ACM Research (Shanghai), Inc.
盛美上海
Domestic wet-cleaning champion whose SAPS/TEBO megasonic and Tahoe single-wafer-batch cleaning platforms are installed at 28nm and below.
- Headquarters
- Shanghai, China
- Region
- Shanghai
- Founded
- 2005
- Stage
- Public
Overview
ACM Research (Shanghai) was founded in 2005 as a Shanghai municipal 'invigorating science and education' key imported integrated-circuit equipment enterprise. It develops, designs, manufactures and sells high-end semiconductor equipment, with a portfolio covering single-wafer and batch wet cleaning, electroplating, stress-free polishing, vertical furnace, front-end track (coater/developer) and PECVD tools. The company's differentiation rests on proprietary single-wafer megasonic cleaning (SAPS and TEBO) and Tahoe single-wafer/batch hybrid cleaning, the latter cutting sulfuric acid consumption substantially. It has been named one of China's top-five semiconductor equipment companies for several consecutive years and has led major national science-and-technology projects. Revenue in the 2026 interim period was RMB 3.72 billion, up 13.9% year on year, with net profit attributable to shareholders of RMB 989 million, up 42.1%, at a 46.9% gross margin; 2025 full-year revenue was RMB 6.79 billion, up 20.8%, with net profit of RMB 1.40 billion and R&D spending of RMB 1.26 billion.
Products
5Single-wafer and batch wet cleaning (单片与槽式湿法清洗)
SAPS/TEBO megasonic single-wafer tools plus Tahoe hybrid single-wafer/batch platforms for 28nm and below.
Electroplating (电镀设备)
Copper and other metal deposition tools for advanced packaging and wafer-level processes.
Stress-free polishing (无应力抛光)
Planarisation tools for specific process steps where CMP stress is a concern.
Vertical furnace and PECVD (立式炉管与 PECVD)
Batch thermal processing and thin-film deposition added to broaden the platform.
Front-end track (前道涂胶显影)
Coater/developer tools for lithography tracks.
Highlights
4- 012026 interim: revenue RMB 3.72bn (+13.9% YoY), net profit RMB 989m (+42.1% YoY), gross margin 46.9%.
- 022025 full year: revenue RMB 6.79bn (+20.8% YoY), net profit RMB 1.40bn, R&D RMB 1.26bn.
- 03Named one of China's top-five semiconductor equipment companies for consecutive years.
- 04Tahoe single-wafer/batch hybrid cleaning substantially cuts sulfuric acid consumption versus conventional single-wafer tools.
People
1Funding
1- Source
IPO
CNY 34.81 亿
Events
0Not yet listed
Related projects
0Not yet listed
Topics
6Coverage
1Information compiled from public sources; refer to the company's official website for authoritative details.